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压电平移台PPX-50

零售价
0.0
市场价
0.0
浏览量:
108
产品编号
PPX-50
台面尺寸:
50x50
行程:
28x28mm
最大载重:
3
分辨率:
1nm
重复定位精度:
±20nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPX-50 is a low profile, long travel, integrated XY stage with an open aperture and a height of only 17.5 mm. Cross roller bearings guarantee smooth and stable motion for loads up to 30 N. It utilizes a multi-phase piezo motor resulting in high speed (>5mm/s) and high blocking force (> 2 N). The PPX-50 is available in open loop or with a linear encoder with a closed-loop esolution of 1 nm. Versions capable of operation in vacuum (10-9 mbar) are available. The PPX-50 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm] 28x28
Straightness/Flatness [µm] ±3.5
Pitch [µrad] ±200
Yaw [µrad] ±100
Weight [g] 120
Motor Compatibility
Motor option Piezo Motor
Speed, max [mm/s] 2 (MMC-100), 5 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option None(open Loop) Analog(1 Vpp) Digital
Resolution, typical [nm] 1 10 1
Repeatability, bi-directional [nm] n/a ±50 ±20
Repeatability, uni-directional [nm] n/a 50 20
Accuracy [µm] - ±1 ±1

 

Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N] My [N] Mz [N]
Load, max 2 2 30 0.6 0.6 0.6

 

Order no.: PPX-50-
DRIVE          
  Piezo Motor, PM-002 1        
TRAVEL          
  28mm   1      
ENCODER          
  None     0    
  Analog (1 Vpp)     2    
  Digital (RS-422)     3    
LIMIT SWITCH          
  None       0  
ENVIORNMENT          
  Atmospheric         0
  High Vacuum, 10-6 mbar         6
  Ultra High Vacuum, 10-9 mbar         9
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