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压电平移台PPS-110

零售价
0.0
市场价
0.0
浏览量:
127
产品编号
PPS-110
台面尺寸:
110×110
行程:
100、200、300、500、1000mm
最大载重:
25
分辨率:
1nm
重复定位精度:
±20nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPS-110 is a high-precision, long travel linear stage. It is available with piezo motor, linear motor, or ballscrew drives. Stainless steel recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25kg. Closed loop resolution of 2nm is achievable with a high precision digital encoder.

Travel Dependent Specifications
Travel range [mm] 100 200 300 500 1000
Straightness/Flatness [µm] ±3 ±4 ±5 ±10 ±15
Pitch [µrad] ±75 ±100 ±125 ±200 ±300
Yaw [µrad] ±75 ±85 ±100 ±200 ±300
Motor Compatibility
Motor option Piezo Motor, PM-003
Speed, max [mm/s] 5 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option Open Loop Digital (RS-422)
Resolution, typical [µm] 0.001 0.002
Repeatability, bi-directional [µm] n/a ±0.02
Repeatability, uni-directional [µm] n/a 0.02
Accuracy [µm] n/a ±1

 

Load Characteristics
Orientation Fx

 

[N]

Fy

 

[N]

Fz

 

[N]

Mx

 

[N·m]

My

 

[N·m]

Mz

 

[N·m]

kax

 

[µrad/N·m]

kay

 

[µrad/N·m]

Load, max 5 150 250 60 30 35 50 50
Order no.: PPS-110PM-
DRIVE          
  Piezo Motor PM-002 1        
TRAVEL          
  100mm   1      
  200mm   2      
  300mm   3      
  500mm   4      
  1000mm   5      
ENCODER          
  None (Open Loop)     0    
  Digital (RS-422)     3    
LIMIT SWITCH          
  None       0  
  Mechanical       1  
  Optical       2  
ENVIRONMENT          
  Atmospheric         0
  High Vacuum, 10-6 mbar         6
  Ultra High Vacuum, 10-9 mbar         9
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