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压电平移台PPS-28

零售价
0.0
市场价
0.0
浏览量:
235
产品编号
pps-28
台面尺寸:
28x28
行程:
26、51、76、102mm
最大载重:
5
分辨率:
1nm
重复定位精度:
±50nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPS-28 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 50 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-28 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-28 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm] 26 51 76 102
Straightness/Flatness [µm] ± 1.5 ± 2.5 ± 3 ± 3.5
Pitch [µrad] ± 50 ± 70 ± 80 ± 100
Yaw [µrad] ± 60 ± 75 ± 90 ± 100
Weight [g] 63 125 165 206
Motor Compatibility
Motor option Piezo Motor, PM-002
Speed, max [mm/s] 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option None (open loop) Analog (1 Vpp) Digital (RS-422)
Resolution, typical [nm] 1 10 1
Repeatability, bi-directional [nm] n/a ± 50 ± 50
Repeatability, uni-directional [nm] n/a 50 50
Accuracy [µm] - ± 1 ± 1
Load Characteristics
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 2 50 50 1 1 1
Order no.: PPS-28-
Drive          
  Piezo Motor, PM-002 1        
Travel          
  26 mm   1      
  51 mm   3      
  76 mm   4      
  102 mm   5      
Encoder          
  None (open loop)     0    
  Analog (1 Vpp)     2    
  Digital (RS-422)     3    
Limit Switch          
  None       0  
Environment          
  Atmospheric         0
  High Vacuum, 10-6 mbar         6
  Ultra High Vacuum, 10-9 mbar         9
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